UV LED Photolithography
UV LED Wafer Stepper
Our broadband UV-LED light sources ALE/1 and ALE/1C are a perfect fit if you
want to upgrade your stepper to UV-LED illumination. Adopting our solution gives
you full flexibility on the choice of photosensitive advanced packaging materials you
may need to apply in your process.
본문
Broadband wafer steppers, variously known as 1X steppers and mini-steppers, are essential to advanced packaging use cases such as fan-out wafer-level packaging (FOWLP),
wafer-level chip-scale packaging (WLCSP), and through silicon via (TSV). These highly specialized step-and-repeat lithography systems serve to create complex microstructures
such as MEMS and compound semiconductors.
첨부파일
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PGL-06-00079-H-Advanced-Light-Engine-ONE-Handout-EN.pdf (1.1M)
0회 다운로드 | DATE : 2024-10-17 15:36:45 -
PGL-06-00080-F-Advanced-Light-Engine-ONE-C-Handout-EN.pdf (714.6K)
0회 다운로드 | DATE : 2024-10-17 15:36:45