MFM MFC Mass Flow Devices

MFC / MFM


The PFLOWC5001 series (OEM version) of gas mass flow controllers can be used for 

general-purpose gas flow monitor and control applications. Additionally, 

it is compatible to Axetris Massflow Controller. 

The PFLOW5002 / PFLOWC5002 series of gas mass flow controllers can be used for 

general-purpose gas flow monitor and control applications. They are available in 

standard or manifold configuration for the mechanical connections. 

Additionally, it is compatible to Axetris Massflow Controller / Flow Sensor. 



본문

 PFLOW(C)5001 (Mass Flow Controller)

PFLOW5001(Mass Flow Meter)

 
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 317952654355d7219d751ce75585e608_1729225671_8109.png 

 Measuring range [SCCM]

0 to 0.05...20 SLPM

Output signal
Linear, 0.5...4.5 VDC, RS232, Rs485 Modbus
Accuracy [± % FS] max.
±1 r.d. or ±0.2 f.s whichever is larger
Supply voltage [VDC]
8...24
Humidity range
0...95% RH, no condensation
Supplier
Angst+Pfister Sensors and Power 

Measuring range [SCCM]
0 to 0.1...20 SLPM or 0 to ±0.1...±20 SLPM

Output signal
Linear, 0.5...4.5 VDC, Rs485 Modbus, I2C

Accuracy [± % FS] max.
±1 r.d. or ±0.2 f.s whichever is larger

Supply voltage [VDC]
8...24

Humidity range
0...95% RH, no condensation

Supplier
Angst+Pfister Sensors and Power




 PFLOW5002 / PFLOW(C)5002

 317952654355d7219d751ce75585e608_1729225909_89.png 

 Measuring range [SCCM]

0 to 0.05...20 SLPM

Output signal
Linear, 0.5...4.5 VDC, RS232, Rs485 Modbus

Accuracy [± % FS] max.
±1 r.d. or ±0.2 f.s whichever is larger

Supply voltage [VDC]
8...24

Humidity range
0...95% RH, no condensation

Supplier
Angst+Pfister Sensors and Power

 


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